发明名称 Pull tester for testing wire connections in microsystem technology
摘要 The pull tester has a sensor, which is used in connection with a capacitive measuring principle. Preferably, the sensor (11) functions as a plate capacitor. The sensor may be deformed by the effect of a force acting on it such that the two capacitor plates are moved away from each other causing a change in capacitance. Preferably test hooks (9) are fastened to the sensor using an adaptor (10). The change in capacitance of the sensor can be used to analyse the signal of a simple oscillator, which provides an interference sensitive output signal in the form of a variable frequency according to the deformation of the sensor.
申请公布号 DE19716461(A1) 申请公布日期 1998.10.22
申请号 DE1997116461 申请日期 1997.04.21
申请人 HOLST, MATTHIAS, 73430 AALEN, DE;MUELLER, GERD, 73540 HEUBACH, DE;SCHMITT, ULRICH, PROF. DR., 73453 ABTSGMUEND, DE 发明人 HOLST, MATTHIAS, 73430 AALEN, DE;MUELLER, GERD, 73540 HEUBACH, DE;SCHMITT, ULRICH, PROF. DR., 73453 ABTSGMUEND, DE
分类号 G01L5/00;G01N3/00;G01N3/06;G01N19/04;H01L21/66;(IPC1-7):H01L21/603;G01N3/08;G01L1/14 主分类号 G01L5/00
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