摘要 |
The valve has a connector (24) with a fluid passage (38) with connections at either end, a reverse suction mechanism (28) for sucking a fluid in the passage, an on/off valve for opening and closing the passage, a controller, a displacement detector for the flexible element (86) and a number of electromagnetic valves (104,106). The magnitude of the displacement of the flexible element is controlled by balancing the control pressure and a bias force of a spring element (78) according to the pressure setting by means of the electromagnetic valves. |
申请人 |
SMC K.K., TOKIO/TOKYO, JP |
发明人 |
ODAJIMA, KATSUHIKO, IBARAKI, JP;KUROSAWA, KENICHI, IBARAKI, JP |