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发明名称
Verfahren zur Herstellung eines Sputtertargets auf der Basis von Zinksulfid sowie das Sputtertarget selbst
摘要
申请公布号
DE19715806(A1)
申请公布日期
1998.10.22
申请号
DE19971015806
申请日期
1997.04.16
申请人
LEYBOLD MATERIALS GMBH, 63450 HANAU, DE
发明人
SCHLOTT, MARTIN, DR., 63075 OFFENBACH, DE;DAUTH, WOLFGANG, 60594 FRANKFURT, DE;KUTZNER, MARTIN, 63543 NEUBERG, DE
分类号
C04B35/547;C23C14/06;C23C14/34;(IPC1-7):C23C14/34
主分类号
C04B35/547
代理机构
代理人
主权项
地址
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