| 发明名称 |
Laser system and use of the laser system |
| 摘要 |
<p>A laser system comprising a laser oscillator emitting laser beam, and an attenuator disposed on a light path of the laser beam and damping intensity of the laser beam in which intensity of the laser beam can be controlled so as to maintain a required value after the attenuator. <IMAGE></p> |
| 申请公布号 |
EP0625401(B1) |
申请公布日期 |
1998.10.21 |
| 申请号 |
EP19940400854 |
申请日期 |
1994.04.19 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED |
发明人 |
NAGAISHI, TATSUOKI;ITOZAKI, HIDEO |
| 分类号 |
H01S3/10;B23K26/42;C23C14/28;H01L21/268;(IPC1-7):B23K26/00 |
主分类号 |
H01S3/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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