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发明名称
Verfahren zum Herstellen eines epitaxial aufgewachsenen Siliciumfilms auf einer Halbleiterunterlage
摘要
申请公布号
DE1237076(B)
申请公布日期
1967.03.23
申请号
DE1963W034704
申请日期
1963.06.14
申请人
WESTERN ELECTRIC COMPANY INC.
发明人
HANDELMAN EILEEN TANNENBAUM
分类号
C01B33/02
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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