发明名称 CERAMIC GREEN SHEET
摘要 PROBLEM TO BE SOLVED: To precisely form via holes by forming a ceramic green sheet contg. ceramic powder and a photosensitive resin and having a specified glossiness. SOLUTION: This ceramic green sheet contains 70-95 wt.% ceramic powder, 30-5 wt.% photosensitive resin consisting of an acrylic copolymer having carboxyl groups and ethylenic unsatd. groups in a side chain and a photoreactive compd., 2-25 pts.wt. photopolymn. initiator such as benzophenone based on the amt. of the photosensitive resin and 0.01-5 wt.% UV absorber such as org. pigment based on the amt. of the ceramic powder and has <=70% glossiness. The ceramic powder has 0.2-10 &mu;m average particle diameter and 2-30 m<2> /g specific surface area and is simple ceramic powder of Al2 O3 , ZrO2 , etc., or glass-ceramic combined powder consisting of 40-60 wt.% glass powder contg. SiO2 , Al2 O3 , CaO and B2 O3 and 60-40 wt.% inorg. powder of one or more among Al2 O3 , ZrO2 , MgO, etc.
申请公布号 JPH10279363(A) 申请公布日期 1998.10.20
申请号 JP19970096736 申请日期 1997.03.31
申请人 TORAY IND INC 发明人 TANAKA TAKESHI;OGATA TOMOHIKO;MASAKI YOSHIKI
分类号 G03F7/004;C04B35/622;C04B35/632;C08F2/50;H01L23/13;H05K1/03 主分类号 G03F7/004
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