| 摘要 |
PROBLEM TO BE SOLVED: To prevent the scattering of dust so as to prevent deterioration in the degree of cleanness in a manufacturing facility shop by discharging air introduced to the cassette housing transferring chamber inside from the lower side of a cassette conveying vehicle via an air flow damping filter arranged on the side wall front face inside the housing transferring chamber and an air passage. SOLUTION: Sucked air from an air suction port 31 formed on a rear face wall 3R in a cassette conveying vehicle 3 is introduced to the inside of a cassette housing transferring chamber 30 from an air passage 35 via a HEPA(High Efficiency Particulate Air) filter 32a and a fan 32b arranged on a side wall 38. Then, the sucked air is discharged from the lower side of the cassette conveying vehicle 3 via an air flow damping filter 6, which is arranged on the front face of a side wall 37, and an air passage 33. In this way, no turbulence of air flow due to a collision of the introduced air against the side wall 37 in the cassette housing transferring chamber 30 is caused and the scattering of dust can be prevented, so that dust is prevented from infiltrating from a doorway 39 of a cassette and an opening of a partition wall into a manufacturing facility shop. |
