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发明名称
METHOD FOR PULLING SINGLE CRYSTAL
摘要
申请公布号
JPH10279380(A)
申请公布日期
1998.10.20
申请号
JP19970080158
申请日期
1997.03.31
申请人
SUMITOMO SITIX CORP
发明人
MORITA HIROSHI
分类号
C30B15/00;C30B29/06;H01L21/208;(IPC1-7):C30B15/00
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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