| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device capable of carrying the long stroke with simple structure using an ultrasonic linear motor. SOLUTION: A member carrying device is provided with a drive shaft 17 having a large diameter disk 17a and a small diameter disk 17b which are turnably supported by a drive base 21 and separated from each other in the direction of the rotary shaft, an ultrasonic linear motor 23 in which a ceramic spacer 23c is abutted on a circular surface of the large diameter disk 17a with the prescribed pressure to turn the disk 17a, and an ultrasonic linear motor 25 to move the ultrasonic linear motor 23 on the large diameter disk 17a in its radial direction, and the outer circumference of the small diameter disk 17b of the drive shaft 17 is abutted on a plate member 5 with the prescribed pressure to move it. |
