| 摘要 |
PROBLEM TO BE SOLVED: To adjust the posture of a crystal member for a base part, i.e., adjust the orientation of the crystal axis, and facilitate the adjusting work for the orientation of the crystal axis by connecting a rotating part to the base part in such a manner that the rotating location may be freely determined. SOLUTION: An X-ray crystal axis orientation measuring device 120 is installed at a specified relative location so that an X-ray L may be emitted within a vertical surface PLV to the end surface 2 of a semi-conductor single crystal material 1. Then, a clamping screw 61 of an engaging means 58 is loosened, and the engagement between a rotating plate 52 and a base plate 51 is released, and while the semi-conductor single crystal material 1, together with the rotating plate 52, is rotated in the directions shown by arrows A, B with a rotating central axis CL1 as the pivot within a specified angular range, the X-ray L is emitted to the end surface 2 of the semi-conductor single crystal material 1 by the X-ray crystal axis orientation measuring device 120, and the X-ray L which has reflected on the end surface 2 is received, and the strength is detected. In addition, based on the strength of the X-ray L, the rotation of the material 1 is stopped at a rotating angular location where the X-ray L is most strongly received during the material 1 rotates in the specified angular range. |
