Device for measuring height of object

摘要

An object surface height measuring device with two acousto-optical modules for refracting light from a light emitter with predetermined refractive indices depending on frequency modulation so that the light is swept over the X and Y axes of an object, and two other acousto-optical modules synchronized with the signals of the first two acousto-optical modules, respectively, so that the light reflected from the object is focused onto a light receiving portion. The change in the height of the object is measured from the variation between the spot of light focused onto the light receiving portion and the center of the light receiver.