Double spacer salicide MOS process and device

摘要

A double spacer salicide MOS device structure and a process for preparing such a device. The double spacer salicide device has a LDD structure. The first sidewall spacer disposed adjacent to the gate structure of the MOS device is higher than the gate. During the salicide process, the first sidewall spacer is used to effectively isolate the gate from the source/drain. The second sidewall spacer disposed adjacent to the first sidewall spacer is used to form the LDD structure.