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发明名称
POLISHING LIQUID
摘要
申请公布号
JPH10279926(A)
申请公布日期
1998.10.20
申请号
JP19970082785
申请日期
1997.04.01
申请人
TOSHIBA CORP;TAMA KAGAKU KOGYO KK
发明人
HIRABAYASHI HIDEAKI;CHIYOU SHIYUNREN;SHIMIZU SHUNPEI
分类号
B24B57/02;C09K3/14;C09K13/06;H01L21/304;H05K3/10;(IPC1-7):C09K3/14
主分类号
B24B57/02
代理机构
代理人
主权项
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