| 摘要 |
PROBLEM TO BE SOLVED: To enhance the efficiency of formation of an SiO2 ceramic film by forming a coating film contg. polysilazane convertible into ceramics at a lowered temp. on the surface of a substrate and irradiating the film with UV. SOLUTION: A catalyst made of carboxylate of a metal such as Pd or Pt is added to polysilazane having a number average mol.wt. of 100-50,000 and a skeleton consisting of structural units represented by the formula (where each of R1 -R3 is H, phenyl, alkenyl, etc.), e.g. perhydropolysilazane so that the weight ratio between the carboxylate and polysilazane is regulated to (0.00001-2):1, especially 0.001:1 and they are brought into reaction to produce polysilazane convertible into ceramics at a lowered temp. Additive including a UV absorber are added by 0.05-10 pts.wt. 1 pt.wt. of the polysilazane and they are applied on a substrate such as a polyester film in 50 Å to 5 μm thickness. The resultant coating film is irradiated with UV of 200-350 nm wavelength for 0.05-3 min to form the objective SiO2 ceramic film. This film is made dense if necessary by heat treatment at room temp. to 150 deg.C in an atmosphere of steam. |
