| 摘要 |
PROBLEM TO BE SOLVED: To decrease powder particles produced during etching by hardening and molding a compsn. containing a thermosetting resin and a hardening agent, pressurizing and carbonizing the molded body in an inert atmosphere. SOLUTION: A hardening agent selected from sulfuric acid, p-toluenesulfonic acid, amine, etc., is added and mixed by 0.001 to 20 wt.% to a thermosetting resin containing >30 wt.% initial condensate of a furan resin with 10 to 90 mol% condensation rate to prepare a resin compsn. The resin compsn. is supplied in a molding die, formed and hardened at 50 to 200 deg.C, and then processed into a specified shape. The formed body is calcined and carbonized under 0.2 to 20 MPa pressure at 300 to 2,500 deg.C in an inert atmosphere such as nitrogen gas to obtain a carbonized body having >=90 wt.% carbon content. If necessary, the obtd. body is heat treated at a temp. higher than the carbonizing temp. and <=2,500 deg.C under normal pressure or reduced pressure to obtain a vitreous carbon. After the heat treatment, if necessary, the obtd. vitreous carbon body is subjected to electrical discharge machining or ultrasonic machining to obtain an electrode plate of a specified shape. |
