发明名称 MASK CARRYING DEVICE
摘要 PROBLEM TO BE SOLVED: To solve a trouble in reading the information by a worker. SOLUTION: When a reticule delivery arm 34 is moved in the direction of the arrow C or the arrow C' in a condition where reticule cassettes 141 -145 to individually store a reticule R in a reticule library 12 are stored, the information of the bar code attached to the outer surface of an opening/closing lid 14a provided on the reticule cassettes 141 -145 are read by a bar code reader 42 provided on the tip of the arm 34. Because a worker need not read the bar code, manually in storing the reticule cassettes in the reticule library 12, the trouble to read the information by the worker can be solved.
申请公布号 JPH10279073(A) 申请公布日期 1998.10.20
申请号 JP19970103812 申请日期 1997.04.07
申请人 NIKON CORP 发明人 SHIMOYAMA TAKASHI;HARA NORIHIKO
分类号 B65G47/48;B65G49/07;G03F7/20;H01L21/027;(IPC1-7):B65G49/07 主分类号 B65G47/48
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