| 摘要 |
PROBLEM TO BE SOLVED: To provide a loading/unloading device capable of minimizing the cycle time of the deposition process in a vacuum apparatus under the use of simple means. SOLUTION: At least one sliding shift sections 26, 26' rotatable around a revolving shaft 42 in the fixed position of the space relative to an opening 24 are made shiftable radially with respect to the revolving shaft by lever transmission devices 23, 23'. These lever transmission devices have push/pull rods 40, 40' which are pivotally fixed at their one-side ends to hermetic caps 14, 14' and are pivotally fixed at an arm 38 which are fixed and coupled to the revolving shaft at their other ends. At least one glipper devices 10, 10' for receiving works and transporting the works are arranged at the sliding shift sections 26, 26'. The ends on the side pivotally fitted to the hermetic caps of the push/pull rods are made shiftable between the open position P2 proximate to the revolving shaft and the close position distant from the revolving shaft in the radial direction with respect to the revolving shaft by the turning of the revolving shaft.
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