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发明名称
NONCONTACT RODLESS CYLINDER AND STAGE DEVICE USING IT
摘要
申请公布号
JPH10281110(A)
申请公布日期
1998.10.20
申请号
JP19970104017
申请日期
1997.04.08
申请人
CANON INC
发明人
MATSUI SHIN
分类号
F15B15/14;G05D3/00;H02N15/00;(IPC1-7):F15B15/14
主分类号
F15B15/14
代理机构
代理人
主权项
地址
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