Thin film hydrogen sensor

摘要

A thin film hydrogen sensor, comprising: a substantially flat ceramic substrate (32) with first and second planar sides (50, 52) and a first substrate end (33) opposite a second substrate end (35); a thin film temperature responsive resistor (34) on the first planar side of the substrate proximate to the first substrate end; a thin film hydrogen responsive metal resistor (36) on the first planar side of the substrate proximate to the fist substrate end and proximate to the temperature responsive resistor; and a heater (62) on the second planar side of the substrate proximate to the first end. <IMAGE>