Method and device for diluting ultra-pure chemical products for use in the microelectronic industry

摘要

A system for preparing a specific mixture of water and a chemical, for use in semiconductor microcircuit manufacture, comprises a vessel (1) for concentrated chemical and a supply (14) of pure water connected by respective valves to a mixing vessel (7), which forms part of a circuit including a pump (24) and a device (32) to monitor the concentration of the mixture, and a vessel (36) which receives the mixture after it has been finally adjusted to the desired concentration and adequately mixed.