发明名称 Semiconductor element and a method of manufacturing the same
摘要 A semiconductor element including a silicon substrate, a silicon oxide film formed on the silicon substrate, and a top electrode formed on the silicon oxide film, wherein chromium is included only in a region of the silicon oxide film, the region including the interface between the silicon oxide film and the top electrode and the vicinity of the interface, and the method of manufacturing the same.
申请公布号 US5821173(A) 申请公布日期 1998.10.13
申请号 US19960674186 申请日期 1996.07.01
申请人 NIPPON STEEL CORPORATION 发明人 TAKIYAMA, MAKOTO
分类号 H01L21/28;H01L21/336;H01L29/51;(IPC1-7):H01L21/31 主分类号 H01L21/28
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