| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide much displacing rate of a diaphragm and enable bidirectional liquid transfer and thinning when sticking piezoelectric elements to a silicone diaphragm prepared by thin film process on a silicone substrate by fixing it in a cantilever form to one side of the diaphragm. SOLUTION: A uni-molf type actuator is prepared by forming two valve diaphragms and one pump diaphragm through etching a silicone substrate 1, and applying a piezoelectric element 3 to each idaphragm. The silicone substrate 1 is connected to a glass substrate 2 formed with a flow passage (through-hole). A packing 4 made of polyimide or the like is pressed against the glass substrate by rigidity of the valve diaphragm, so that the valve is closed. In such a case, the piezoelectric element is plurally divided and applied to the valve diaphragm in a cantilever form, for increasing a displacing rate of the diaphragm.</p> |
