| 摘要 |
An anti-reflection coating is provided that has a barrier layer and an anti-reflective layer. The barrier layer stops reactions between the anti-reflective layer and underlying layers or substrates, does not make the anti-reflective layer reflective, and preferably does not react with either the reflective layer or the anti-reflective layer. In particular embodiments, the barrier layer is a thin layer of silicon dioxide SiO2 or silicon nitride Si3N4, and the anti-reflective layer is titanium-tungsten TiW, titanium nitride TiN, or amorphous silicon.
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