首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems
摘要
申请公布号
US4805123(B1)
申请公布日期
1998.10.13
申请号
US19860885197
申请日期
1986.07.14
申请人
KLA INSTRUMENTS CORPORATION
发明人
SPECHT, DONALD, F.;WIHL, TIM, S.;YOUNG, SCOTT, A.;HAGER, JAMES J., JR.;LUTZKER, MATTHEW, B.
分类号
H01L21/66;G01B11/00;G01N21/88;G01N21/956;G03F1/08;G06T1/00;G06T7/00;H01L21/027;H01L21/30;(IPC1-7):G06K9/68;G06K9/38
主分类号
H01L21/66
代理机构
代理人
主权项
地址
您可能感兴趣的专利
DROPLET-EJECTING HEAD, METHOD FOR MANUFACTURING DROPLET-EJECTING HEAD, AND DROPLET-EJECTING APPARATUS
COOLING MODULE FOR MOTOR VEHICLES AND MOTOR VEHICLE
COLLAPSIBLE COVER SECURED TO AN AUTOMOBILE
DATA PROCESSING DEVICE AND MOBILE DEVICE
TESTING METHOD AND COMPUTER DEVICE AND COMPUTER TESTING SYSTEM USING THEREOF
INHIBITORS OF FATTY ACID AMIDE HYDROLASE
METHODS AND PRODUCTS FOR MEASURING FREE IMMUNOGLOBULIN LIGHT CHAIN MOLECULES
DEVELOPING DEVICE AND IMAGE FORMING APPARATUS
6-PHENYL-PYRIMIDIN-4-YL-(PHENYLAMINE OR PHENOXY) DERIVATIVES USEFUL AS MODULATORS OF NICOTINIC ACETYLCHOLINE RECEPTORS
IMAGE PROCESSING CIRCUIT, INFORMATION REPRODUCING APPARATUS AND IMAGE PROCESSING METHOD
LIQUID CRYSTAL DEVICE AND ELECTRONIC APPARATUS
CAMERA AND IMAGE COMPOSITION PROGRAM
IMAGING DEVICE AND COMPUTER-READABLE MEDIUM
SENSORLESS STARTING CONTROL METHOD FOR A BLDC MOTOR
Shower faucet
HIGH-STRENGTH STAINLESS STEEL PIPE EXCELLENT IN SULFIDE STRESS CRACKING RESISTANCE AND HIGH-TEMPERATURE CARBONIC-ACID GAS CORROSION RESISTANCE
APPARATUS FOR SEPARATING PARA-XYLENE FROM A MIXTURE OF C8 AND C9 AROMATIC HYDROCARBONS
STAND-UP FILM BAG AND METHOD OF MAKING SAME
Timepiece
ADJUSTING MECHANISM FOR ADJUSTING A POSITION OF A SCREEN AND RELATED DISPLAY DEVICE
