Heating elements and a process for their manufacture

摘要

Disclosed is a heating element having improved performance, particularly at high power densities and high temperatures. The heating element comprises a substrate having a first layer comprising a silicon based electrically insulating material on its surface. On a surface of the first layer is a second layer comprising a silicon based electrically resistive material. Attached to the second layer are at least two separate areas of silicon based electrically conductive material. Each of these separate areas are suitable for connection to a power supply.