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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10275909(A)
申请公布日期
1998.10.13
申请号
JP19970081192
申请日期
1997.03.31
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
SUZUMURA MASAHIKO;HAYAZAKI YOSHIKI;TAKANO MASAMICHI;KISHIDA TAKASHI;SHIRAI YOSHIFUMI;SUZUKI YUJI
分类号
H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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