| 摘要 |
There is provided a trap apparatus, which is inserted in a vacuum exhaust system sucking and discharging an exhaust gas from a process apparatus by a vacuum pump, for trapping a tramp material contained in the exhaust gas, said trap apparatus comprising, a trapping passage container inserted in the exhaust passage, at the upstream side of the vacuum pump, and a heating trap, housed in the trapping passage container, for heating the exhaust gas to a predetermined temperature while the heating trap is brought into contact with the exhaust gas flowing, thereby subjecting the tramp material in the exhaust gas to pyrolysis. Thus, the unaffected process gas circulated through the exhaust passage is touched by the heating trap and pyrolytically decomposed, and separated metal adheres to the heating trap so as to be trapped thereby. The heating trap is formed of an electric heating coil formed spirally so as to define a gap between the wire thereof, so that the electric heating coil can be sufficiently brought into contact with the exhaust gas and the exhaust gas is allowed to flow through the gaps between the wires. Therefore, the area that the exhaust gas is brought into contact with the wires of the electric heating coil becomes larger, and the exhaust gas can flow through the gaps to secure the flowing conductance. As a result, a balance of the contact area and the flowing conductance is maintained.
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