| 摘要 |
In a vacuum treatment system for depositing thin coatings on substr ates(36 through 38), with several stationary treating ch ambers (8 through 11) that are held by the annular or frame-like side wall (3) of the vacuum chamber (2) and display the treatment tools (41, 42,...), and with treatment chamber openings (4 through 7) aligned peripherally inward on the center of the vacuum chamber (2) and extending in planes parallel to each other, a shaft (14), extending parallel to the opening planes and mounted in the vacuum chamber lid and/or in the vacuum chamber bottom plate (12) of the vacuum chamber (2), is provided that moves the plates (23 through 26) for closing the treatment chamber openings (4 through 7) and is supplied with actuators (19 through 22) for moving the closing plates (23 through 26) from a radially inner opening position to a radially outer closing position, whereby the actuators working together with the shaft (14) are designed as lever pinions (19 through 22).
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