发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a dynamic random access memory wherein a junction leak current can be reduced. SOLUTION: A cut layer 7a of a second conductivity type is provider only immediately below a trench isolation oxide film 5 in a semiconductor board 1. A punch through stopper layer 9 of a second conductivity type and a low concentration impurity diffusion layer 15 of a first conductivity type sandwiching the punch through stopper layer 9 are provided toward inside a board from a main surface of the semiconductor board 1. A pair of source/drain regions 12 of a first conductivity type of LDD structure containing a high concentration part and a low concentration part are provided in a main surface of the semiconductor board 1.
申请公布号 JPH10270663(A) 申请公布日期 1998.10.09
申请号 JP19970077190 申请日期 1997.03.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 YONEDA KIWA
分类号 H01L21/8234;H01L21/8242;H01L27/088;H01L27/108 主分类号 H01L21/8234
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