METHOD AND DEVICE FOR REPAIRING CONDUCTIVE PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a method and device for repairing conductive pattern by which the disconnection and breakage of a conductive pattern can be repaired mechanically with high efficiency and which are particularly suitable for the repair of such a conductive pattern that is composed of extremely narrow thin lines. SOLUTION: The disconnected or broken part of a conductive pattern of electrodes, etc., formed on a substrate 2 is repaired by supplying conductive paste prepared by dispersing very fine particles of a conductive material in a dispersion medium in a drop-like or linear state through a repair pen 8 which is freely moved on the surface of the substrate 2 and forming a conductive film by locally heating the supplied paste. A camera 13 for detection detects a spot to be repaired and the pen 8 is positioned to the spot to be repaired. Then the conductive paste is supplied to the spot while a camera 14 for monitor monitors the supplying state of the paste and a heating means which moves together with the pen 8 forms a conductive film by locally heating the supplied paste.