| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic levitation conveyor, in which an article to be conveyed is supported in a noncontact manner under the state, in which the article is tilted to the horizontal direction, and which can be conveyed in the holding state for reducing the generation of particles. SOLUTION: The electrostatic levitation conveyor has a holder 201, on which an insulating substrate 202 with an electrode 204 for generating electrostatic force for holding a conveyed article 501 under a noncontact state by electrostatic attracting force is disposed in upright, a control section for adjusting applied voltage to the electrode 204 for generating electrostatic force of the holder 201, a support member 206 for supporting the conveyed article 501, and a sliding mechanism moving the support member 206 along the holder 201 are installed. |
