| 摘要 |
PROBLEM TO BE SOLVED: To very precisely detect only a scattered light near a front end of a probe which strongly reflects optical data of a sample by a method wherein signal processing means removes a signal component in response to the scattered light other than the light near a front end of a probe. SOLUTION: This scanning optical microscope has a piezoelectric scanner 6 to which a sample pedestal 4 is attached, and a cantilever 8 for detecting surface data (AFM measurement data) and optical data (SNO measurement data) of a sample 2. A SNOM illumination unit 68 irradiates a SNOM illuminating illumination light M1 to a surface of the sample 2 from obliquely, and a SNOM detection unit 70 detects the SNOM measurement data of the sample 2. From an output signal of the detection unit 70, a computer 22 (signal processing means) calculates for removing a signal component in response to a scattered light other than near a front end of a probe. As this reason, only the scattered light from near a front end of the probe (the scattered light strongly reflecting the optical data of the sample 2) is detected with high precision.
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