| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an organic electroluminescent element and its manufacturing device capable of preventing the inflow of evaporation material in a vapor deposition space, thus ensuring excellent element performance. SOLUTION: While a base 15 is carried to a plurality of vacuum chambers 34, 21, 22, 23 and 54 which include an organic substance deposition chamber 21 and a metal deposition chamber 23 and which are connected so as to be possibly communicated to one another, an organic substance layer and an electrode are shaped as a film on the base 15. In this method for manufacturing an organic electroluminescent element, the base 15 is carried to a neighboring vacuum chamber under conditions where a pressure difference between the vacuum chamber with the base 15 arranged therein and the vacuum chamber adjacent thereto is 5×10<-4> Pa or less. As a result, the pressure of two chambers reaches a equilibrium state without mutual inflow of evaporation material or impurities when the base 15 is carried, and therefore, the contamination of the film due to the presence of evaporation material or impurities within the other vacuum chamber can be prevented to ensure excellent element performance.
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