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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH10270644(A)
申请公布日期
1998.10.09
申请号
JP19970068169
申请日期
1997.03.21
申请人
NEC CORP
发明人
TAKAYAMA SHOJI
分类号
G01R31/28;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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