| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular velocity sensor which has high output sensitivity and an excellent temperature characteristic. SOLUTION: An angular velocity sensor is provided with a plurality of vibrators 2 which are partially supported on and fixed to a substrate 1 in insulated states, formed in vibratile beam-likes shapes, and arranged in parallel with each other in the driving direction, a pair of reference electrodes 4 and 5 which are supported on and fixed to the substrate 1 in insulated states in the driving direction, a driving means which vibrates the vibrators 2 in the driving direction, detecting electrodes which are arranged in the direction of the Coriolis force which is generated when the vibrators 2 are rotated on the substrate 1 at intervals between each beam section, and a means which detects the Coriolis force by using the detecting electrodes 3. The vibrators 2 have different resonance frequencies and the frequencies are changed by changing at least one of the widths, lengths, and thicknesses of the beam sections. |
