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发明名称
METHOD FOR SEPARATING SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH10270543(A)
申请公布日期
1998.10.09
申请号
JP19980053038
申请日期
1998.03.05
申请人
LG SEMICON CO LTD
发明人
KIN YONKAN;RI SHUNSEI
分类号
H01L21/76;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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