TWO-TERMINAL TYPE NONLINEAR ELEMENT, ITS MANUFACTURE, AND LIQUID CRYSTAL DISPLAY PANEL

摘要

PROBLEM TO BE SOLVED: To provide an MIM(metal-insulator-metal) type nonlinear element which exhibits a steep voltage-current characteristic and has a large nonlinear factor, a liquid crystal display panel which uses the element and can display high-quality pictures, and a method for manufacturing the element. SOLUTION: An MIM type nonlinear element contains a first conductive film 22, an insulating film 24, and a second conductive film 26 successively formed on a substrate 30. The insulating film 24 contains water in such a state that the water content decreases in the depth direction of the film 24 from the secondary conductive film 26 side. In the elemental analysis by the secondary ion mass spectrometry using the irradiation of the primary ion of cesium, the spectrum of hydrogen derived from the water has a peak near the surface of the insulating film 24 on the second conductive film 26 side. In addition, the peak derived from the water in the insulating film 24 falls within the range of 220 deg.C±5 deg.C in the thermal desorption spectrum.