| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film magnetic head for hard disk for narrow track width high density recording, which has high precision of an upper part pole width and a sufficient characteristic, can use high saturated magnetic flux density material for an upper part pole and can improve an NLTS (nonlinear transition shift) and recording density. SOLUTION: A lower part pole 15 is formed on a substrate 10, and a gap layer 13 is formed on a protection film 12 buried with the lower part pole 15. A first upper part pole 17 is formed on this gap layer 13 so as to oppose to the lower part pole 15. The protection film 14 is formed so as to align with the upper surface of this first upper part pole 17, and a coil part consisting of plural layers of coils buried in an insulation layer 20 is provided on this protection film 14. An upper part core layer 19 is formed on this coil part, and its tip part forms a second upper part pole 18 laminated on the first part pole 17 and electrically connected to it. An upper part pole 16 is formed by the first upper part pole 17 formed before the coil part is formed and the second upper part pole 18 formed after the coil part is formed. |
