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发明名称
HEIGHT ADJUSTMENT MECHANISM OF SPECIMEN FACE IN SURFACE ANALYZER
摘要
申请公布号
JPH10269979(A)
申请公布日期
1998.10.09
申请号
JP19970073788
申请日期
1997.03.26
申请人
JEOL LTD
发明人
TAZAWA TOYOHIKO
分类号
H01J37/20;H01J37/252;H01J37/28;(IPC1-7):H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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