发明名称 WIRE BONDING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To make exchanging work of electrodes unnecessary, and improve the operating efficiency, by constituting a discharge electrode as a common discharge electrode having a sharp discharge part and a flat discharge part positioned on a tip prolongation of a wire, performing fixed type discharge in the state that a discharge gap adjusting mechanism is fixed, and performing movable type discharge on a flat discharge surface by operating the discharge gap adjusting mechanism. SOLUTION: A common discharge electrode 15 consists of a flat retaining plate 16 and a rod type electrode 17 which has a circular section and obliquely penetrates the lower part of the plate 16. The retaining plate 16 is fixed to a retainer of a discharge gap adjusting mechanism. The rod type electrode 17 is bent in the middle of the tip side, and constitutes a discharge part 20 of smaller inclination angle. The upper half part is eliminated, and a flat surface is formed. This surface forms a flat discharge surface 39 of a flat discharge part 21. A tip discharge part 34 having a sharp tip is installed on one side of the discharge part 20. In the case of fixed state, the common discharge electrode 15 performs discharge 23 between the tip of a wire 36 held by a capillary 35 and the tip discharge part 34, and in the case of movable state, performs discharge 23 on the flat discharge surface 39 of the upper surface.
申请公布号 JPH10270486(A) 申请公布日期 1998.10.09
申请号 JP19970071580 申请日期 1997.03.25
申请人 HITACHI LTD;AKITA DENSHI KK 发明人 SHIBATA TORU
分类号 H01L21/60 主分类号 H01L21/60
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