| 摘要 |
PROBLEM TO BE SOLVED: To shorten the rising time of a sensor by forming a porous ceramic insulation film on a zirconia solid electrolyte by spraying while insulating electrically and providing a film-like heater on the insulation film. SOLUTION: A tubular reference electrode 4 is formed on the inner surface of a tubular zirconia solid electrolyte 11 having sealed forward end and detection electrodes 2, 3 are formed on the outer surface thereof and then reference gas components are introduced into the central tubular space 12 of the reference electrode 4. Signals are led out from the detection electrodes 2, 3 through a lead part 7 and a lead wire 9. A porous ceramic insulation film 51 is formed at the forward end part of a zirconia solid electrolyte 11 by spraying, a film-like heater is provided thereon followed by formation of a porous ceramic thermal insulation film 6 on the outer surface thereof by spraying. Alternatively, a diffusion film 5 or a protective film 5 is formed on the outer surface of the detection electrode 2 and a porous ceramic insulation film 52 is formed on the surface of the zirconia solid electrolyte 11 by spraying. According to the method, thermal conductivity is enhanced and the rising time of a sensor can be shortened. |
