发明名称 VIBRATING ACTUATOR AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To reduce a frequency-temperature coefficient, and to eliminate the need for temperature compensation, by improving the frequency-temperature characteristics of itself. SOLUTION: In the vibrating actuator 10 containing an elastic body 11 and piezoelectric bodies 12 being joined with the elastic body 11 and exciting the elastic body by applying a driving signal, materials, in which the codes of the temperature coefficients of resonance frequency differ and the difference of absolute values is kept within a specified range, are used as the elastic body 11 and the piezoelectric bodies 12. When a metallic material is employed as the elastic body 11, a material having the temperature coefficient of positive 400 or more of resonance frequency is used as the piezoelectric body 12.
申请公布号 JPH10271857(A) 申请公布日期 1998.10.09
申请号 JP19980007772 申请日期 1998.01.19
申请人 NIKON CORP 发明人 GONDA TSUNEMI
分类号 H01L41/09;H02N2/00 主分类号 H01L41/09
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