| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method for obtaining an angular velocity sensor compact, lightweight and capable of detecting biaxial angular velocity with little difference of biaxial detecting sensitivity. SOLUTION: Image data of a vibrator-weight body assembly 51 is taken in by a camera 62 (visual device) for image recognition. On the basis of the taken-in image, a control part 63 computes the center (coordinates) and outer diameter of a weight body 28, and the center (coordinates) and outer diameter of a vibrator 21. A measuring apparatus 64 then measures the height of the vibrator 21 and weight body 28 with the upper face of a table 61 as a reference. The measured data is sent to the control part 63 and computed to obtain height. In case the dimensions of the vibrator 21 and weight body 28 are within a specified range, the cut quantity and position of a groove 21a of the vibrator 21 are computed. A command is outputted from the control part 63, and the groove 21a of the vibrator 21 is machined by a machining tool 65. After completion of machining, the vibrator-weight body assembly 51 is detached from the table 61.</p> |
