| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic thin film with an electrical resistance and an anisotropic magnetic field, which show superior soft magnetic characteristics, even in high frequency region, and a large saturated magnetization. SOLUTION: This magnetic thin film is formulated with a general formula Co100- X- Y- ZFeXMYOZ (atom%), and atomic ratios are 10<X<50, 2<Y<10, 6<Z<25 and 15<X+Y+Z<65, respectively. M is Al, Zr, Ti, Hf, Mg, Be or at least one kind of rare-earth elements whose heat of oxide of formation is -1000 kJ or above, and an anisotropic magnetic field is 20 Oe or above, an electrical resistivity value is 50μΩcm or above, and saturation magnetic flux density is 16 kG or above in it.
|
