ALIGNER FOR MANUFACTURING INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide an aligner device which is not deteriorated in its characteristic, such as the durability, light transmissivity, etc., even when the device emits ArF excimer laser and can be manufactured at a low cost by constituting its optical system by combining of a synthetic quarts glass optical body having specific physical properties with a fluorite optical body. SOLUTION: The optical system of the aligner is constituted by combining a synthetic quarts glass optical body with a flourite optical body. The optical body (wafer-side optical body) on the side where the densityε(mJ/cm<2> ) of light energy transmitted through the optical bodies is relatively large is constituted of single-crystal fluorite and the optical body (light-source side optical body) on the side where the densityε(mJ/cm<2> ) of light energy transmitted through the optical bodies is relatively small is constituted of synthetic quartz glass having a hydrogen molecule concentration of 1×10<17> to 5×10<18> molecules/cm<3> which is nearly equal to the doped concentration of the glass under a normal pressure so that the optical system may have high transmissivity as a whole. A more preferable optical system is constituted of a plurality of kinds of synthetic quarts glass optical bodies and a single-crystal fluorite optical body.