| 摘要 |
PROBLEM TO BE SOLVED: To provide the substrate processor and the substrate processing system using processing recipes, which can readily change the contents of data and can be transferred to other substrate processors. SOLUTION: The processing recipe of a substrate processor is constituted of flow recipe data 1, which specify the carrying procedure of substrates, and libraries 2-5, wherein the processing conditions of a processing unit are classified and stored for every kind of the processing unit. In the flow recipe daft 1, the sequence of the processing and numbers of the processing condition indicating the storing positions in the libraries for the processing conditions of the respective determined processing unit are set. The substrate processor selects the required flow recipe among the flow recipe data, reads out the processing conditions among the libraries 2-5 based on the numbers of the processing conditions in the selected flow recipe, outputs the conditions to each processing unit and processes the substrate in accordance with the procedure determined in the flow recipe data. |
