| 摘要 |
PROBLEM TO BE SOLVED: To obtain a scanning probe microscope advantageous in measuring a sample mixed with a conductive part and an insulating part by a method wherein there is provided control switching means for switching from control of making constant a measured value of a physical amount of either one of an interatomic force and a tunnel current to control of making constant the other. SOLUTION: This scanning probe microscope has a function of measuring an interatomic force and a tunnel current between a probe 1 and a sample, respectively. A distance between the probe 1 and a sample is controlled so that the measured value of one physical amount is made constant, while in the state that the probe 1 and a sample are relatively scanned, the other physical amount is measured. If the physical amount exceeds a predetermined set value, the control switching means switches from control of making constant the measured value of one physical amount to control of making constant the other physical amount. Namely, a switch 12 switches a z-directional control signal to a feedback signal from either one of servo circuits 4, and 8 by a signal from a control switching circuit 5.
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