LIGHTING DEVICE, EXPOSURE DEVICE AND MANUFACTURE OF DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a lighting device having integrators of inner reflection type and amplitude division type which can change the state of lighting. SOLUTION: A zoom optical system 5 for forming an image on the plane of light incidence of an integrator 7 from a surface light source formed by an integrator 4 is placed between the integrator 4 of inner reflection type and the integrator 7 of amplitude dividing type. The magnification of image formation of the zoom optical system 5 is variable. By changing the magnification of image formation of the zoom optical system 5, the size of a surface light source image on the plane of light incidence of the integrator 7 is changed and an opening angleαof illuminating light with respect to a mask 9 is also changed.