发明名称 FINE-WIRE, PHOTOELECTRIC CONVERSION ELEMENT WITH FINE-WIRE, AND THEIR MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a fine-wire capable of being applied to a photoelectric conversion element, etc. SOLUTION: In a fine-wire 10, forming a silicon fine-wire portion 11 on a silicon substrate 1, a silicon-dioxide fine-wire portion 12 is formed at the end of the silicon fine-wire portion 11 via a metallic portion 13. The silicon fine-wire portion 11 has a photoelectric conversion function and the silicon- dioxide fine-wire portion 12 has a light transferring function. After depositing gold as a catalyzer on the silicon substrate 1, they are heated to form a fused alloy drop. Then, feeding a silane gas to the intermediate, the silicon fine-wire portion 11 is grown under the fused alloy drop by the catalytic action of the fused alloy drop. Subsequently, heating the portion 11 in an oxygen atmosphere, the end portion of the silicon fine-wire portion 11 is oxidized by the catalytic action of the fused alloy drop.
申请公布号 JPH10270725(A) 申请公布日期 1998.10.09
申请号 JP19970076156 申请日期 1997.03.27
申请人 SONY CORP 发明人 JONATHAN WESTWATER;DARAM PAL GOSAIN;NAKAKOSHI MIYAKO;USUI SETSUO;TAMADA HITOSHI
分类号 H01L27/146;H01L29/06;H01L31/0248;H01S5/34;(IPC1-7):H01L31/024 主分类号 H01L27/146
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