| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laminated film composed of a magnetic metal layer and a semiconductor layer or a semi-metal layer by a method, wherein a non- magnetic film of specific crystalline structure and specific M-Si composition is formed on a magnetic base film. SOLUTION: A non-magnetic layer included in a laminated layer is formed of material whose composition is represented by a formula, M1- XSi (0.5<=X<=1.0, and M is at least a kind selected from among Fe, Co, Ni, Cr, and Mn) and crystal structure is set to be a B20 structure (εphase). Other elements such as Ge, Mo, B, and C may be added to M silicide, but they are to be limited to 10 at.% in content. Various boards of Si, alumina, spinel, MgO, GaAs, Ge each possessed of an Si, SiO2 surface layer are used as a board. A buffer layer such as a CoZrNb amorphous layer or a Ta layer may be formed on the surface of the board. When an fcc magnetic base layer is formed, it enhances orientation in (111), the board is improved in surface smoothness, and the like.
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